Software Suite
APS Software Suite
The configurable control platform for cluster tools & multi-PLC deposition systems
Sold by SWS Vacuum Technology
APS System Control running a six-chamber cluster tool across five PLCs: loadlock, central transfer robot, four process chambers and per-chamber RF power — the same platform, scaled up purely by configuration.
Built for clusters — one platform, four tools
Building a multi-chamber system shouldn’t mean building control software from zero. The APS Software Suite is purpose-built for cluster tools and multi-PLC systems — a loadlock, a central transfer robot and many process chambers spanning several PLCs, each with its own state machine and safety, all orchestrated by one recipe. The very same configuration scales down to a single-chamber lab tool — and you build it all without writing a line of code.
The Platform
Four integrated tools that cover the full lifecycle — from system design to production operation.
System Builder laying out a deposition system’s live schematic and hardware — every device, pipe, screen, interlock and recipe configured here, no XML, no code.
System Builder
Design & configure your whole machine — visually, no code
- ▶ Visual panel designer — drag, drop and configure 18 vacuum component types with snap-to-grid and a pixel-perfect runtime preview.
- ▶ Piping diagram editor — route pipes between components with automatic gas-type colour coding.
- ▶ Multi-PLC & cluster setup — configure many PLCs, a transfer robot and per-chamber hardware in one project, with interlock, alarm, recipe, graph and panel editors alongside.
- ▶ New-from-PLC wizard — generate a complete project straight from your existing PLC program and MCGS SCADA project.
- ▶ Live validation — real-time error checking across the whole configuration before you ever go live.
What it means for you
Commission new systems in days, not months — then change the machine yourself afterwards, without a software vendor in the loop for every tweak.
- Migrate existing MCGS projects without rebuilding from scratch.
- Keep full ownership of your configuration — no lock-in.
- One tool configures everything from a single-chamber lab tool to a multi-PLC cluster.
System Control — the live Process panel for a four-chamber cluster: each chamber’s pressure, power, temperature and gas at a glance, the transfer module and robot at the centre, real-time trends down both sides.
System Control
Run the machine — a modern, real-time operator experience
- ▶ Cluster tools & multi-PLC — run many chambers across many PLCs as one system, each with its own state machine; the transfer robot moves substrates on a single recipe command.
- ▶ Live schematic & process screens — valves, pumps, flows and pressures update in real time, with gas-coloured routing and custom per-chamber process views.
- ▶ Recipe automation — run structured processes with loops, variables and one-click operations.
- ▶ Safety interlocks & alarms — per-chamber state machines and an alarm banner with silence and reset.
- ▶ Trends & data logging — scrolling trend graphs plus per-run data logging to local TSV files; a MySQL / MariaDB database backs user accounts and the production job queue.
What it means for you
Operators see the whole system at a glance and run repeatable processes with a single click — on standard industrial PCs or touch screens.
- Real-time interlocks protect the hardware and the product.
- Consistent, traceable runs with continuous data logging.
- The same screen scales from one chamber to many.
Recipe Editor — the visual recipe builder (centre) with the parameter tree (left) and the operator parameter form (right) for a four-chamber cluster process.
Recipe Editor
Engineers own the process — operators tune only what you expose
- ▶ Structured recipe format — readable, version-friendly .rcpx files that validate before they run.
- ▶ Visual block builder — assemble recipes from hardware, power, process, timing and flow blocks — or edit as text.
- ▶ Operator parameter forms — expose only safe, named parameters (power, time, pressure, flow).
- ▶ Full validation — catch errors at design time, before a recipe ever touches the hardware.
- ▶ Cluster orchestration — one recipe drives the whole multi-chamber system; a single transfer step moves wafers between chambers across PLCs.
What it means for you
Engineers lock in the proven process; operators adjust only the parameters you allow — so results stay repeatable and mistakes are designed out.
- Fewer operator errors, consistent product quality.
- Fast authoring of complex multi-material, multi-chamber recipes.
- Your process know-how stays protected inside the recipe.
System Emulator — a complete six-chamber cluster running in simulation across several emulated PLCs: live chamber pressures, pumps at speed and gas flows, with no hardware attached.
System Emulator
Develop, commission and train — with zero hardware risk
- ▶ Real vacuum physics — pressure evolution, pump curves, throttle scaling, gas loads, leak rates and thermal loads.
- ▶ Protocol-level emulation — emulates many S7-200 PLCs at once over TCP, plus serial devices over virtual COM ports and Modbus power supplies.
- ▶ True drop-in — the identical configuration runs against the emulator and the real machine, no changes.
- ▶ Operator training — practise start-up, recipes and fault handling safely.
- ▶ Classroom licensing — install on any number of training machines for a whole lab.
What it means for you
De-risk commissioning and validate every recipe before it touches a chamber — and train operators without tying up, or endangering, a production machine.
- Bring up and test a whole multi-PLC cluster offline, before the hardware exists.
- Same configuration offline and on hardware — no surprises.
- Train a whole team in parallel, at no risk to the equipment.
Built for cluster tools & multi-PLC systems
Loadlock, transfer robot and many process chambers across many PLCs — each with its own state machine, alarms and interlocks, all orchestrated by one recipe. Add a chamber or a PLC by configuration, not re-coded SCADA.
Features & Capabilities
Real-Time Hardware Control
Polls Siemens S7-200 PLCs every 200ms over Ethernet — many PLCs in one system at once. Lock-free, channel-based threading ensures responsive UI even under heavy I/O. Supports serial devices and network instruments simultaneously.
Live Vacuum Schematic
Interactive system diagram with real-time device states. Valves show open/closed, MFCs display flow rates, sensors show pressure readings — all updating live. Gas routing lines colored by gas type (Ar, N2, vacuum, vent).
Recipe Automation (DSL)
Intuitive line-based recipe language with variables, loops, functions, and conditional logic. Embedded recipes for common operations (load/unload substrate, pump-down sequences). Full validation before execution.
# Sputter deposition — pump down, coat 3 layers, shut down
var base = 0.05 # base pressure (Torr)
var dep_time = 30 # per-layer deposition (s)
pump TP1 on
pwait pm $base 120 # wait for base vacuum, 120s timeout
valve M1 open
MFC Ar1 15 # 15 sccm argon
delay 10 # let pressure settle
rotation on 3.0 # start substrate rotation
loop 3 # coat 3 layers
shutter S1 open
delay $dep_time
shutter S1 close
endloop
rotation off
MFC Ar1 0 # gas off
pump TP1 off
message "Process complete — ready to unload"Visual Panel Designer
WYSIWYG canvas with percentage-based grid layout. Drag, resize, and configure 18 vacuum component types. Multi-select, snap-to-grid, alignment guides, and arrow-key nudging. Pixel-perfect preview of runtime appearance.
Piping Diagram Editor
Click-and-drag pipe routing between component anchor points. Automatic gas-type color coding (Ar=cyan, N2=green, vacuum=orange). Waypoint editing for complex routing. Full schematic export to runtime XML.
Safety Interlocks & Alarms
XML-defined interlock rules enforce safe operating conditions (pressure limits, valve sequencing, pump protection). Alarm banner with real-time notifications, silence, and reset. State machine ensures correct startup/idle/processing transitions.
Physics-Based Simulation
Real vacuum physics: chamber pressure evolution with exponential time constants, pump speed curves, throttle scaling, gas load equilibrium, leak rate modeling. MFC flow response with valve dynamics. Thermal load simulation.
Protocol-Level Hardware Emulation
Speaks native device protocols — no code changes needed in Control. Many S7-200 PLCs at once over TCP (port 102), serial devices via virtual COM ports or TCP loopback, Modbus RTU for power supplies. Complete drop-in replacement for real hardware.
Supported Hardware
Editions & Features
| Feature | Basic | Pro | Ultimate |
|---|---|---|---|
| Direct system control (mouse or optional touch screen) | ✓ | ✓ | ✓ |
| Configurable system diagram (live schematic) | ✓ | ✓ | ✓ |
| Embedded scripts for basic operations | ✓ | ✓ | ✓ |
| Adjustable real-time graphs panel | ✓ | ✓ | ✓ |
| Continuous data logging (local) | ✓ | ✓ | ✓ |
| Recipe scripting language (built-in worker) | ✓ | ✓ | ✓ |
| Configurable alarms and interlocks | ✓ | ✓ | ✓ |
| Cluster tools & multi-PLC orchestration | ✓ | ✓ | ✓ |
| Support of custom PLC controllers | ✓ | ✓ | ✓ |
| Support of custom vacuum components | ✓ | ✓ | ✓ |
| Support of custom hardware panels | ✓ | ✓ | ✓ |
| Basic integration package * | ✓ | — | — |
| Advanced integration package ** | — | ✓ | ✓ |
| APS System Builder (visual configuration tool) | — | ✓ | ✓ |
| APS System Emulator (offline hardware simulator) | — | ✓ | ✓ |
| APS Recipe Editor (operator parameter forms) | — | ✓ | ✓ |
| Remote system status monitoring *** | — | ✓ | ✓ |
| Custom script language (custom workers) | — | — | ✓ |
| Jobs scheduler | — | — | ✓ |
| Custom detailed process screen | — | — | ✓ |
| Remote data logging (planned) **** | — | — | ✓ |
* Basic integration package: configuration file examples, source code templates, and examples of custom DLLs for hardware, controllers, interlocks, alarms, custom panels, and embedded scripts.
** Advanced package: everything from Basic plus configuration, templates, and examples for custom workers and custom process panels.
*** Requires a remote HTTP server. **** Planned capability; will require a remote database server (MySQL / MariaDB).
Licensing
Perpetual (lifetime) license per installation per single PLC unit — add a license per PLC for multi-PLC cluster systems. Includes 1 year of free support and updates within the same major version. System Emulator offers classroom licensing for any number of training machines. Contact us for a detailed quote.
Integration Services
We offer full system integration with your hardware, including custom driver development, panel design, recipe authoring, and on-site commissioning support. Each engagement includes a 1-year warranty. Extended support contracts available.
Platform Requirements
Operating System: Windows 10/11 x64 · Runtime: .NET 9.0 · PLC: Siemens S7-200 (Ethernet, multiple)
The APS Software Suite runs on standard industrial PCs, with optional touch-screen panel and tablet support. No proprietary hardware required beyond your PLCs and instruments. Fully compatible with standard Siemens S7-200 PLCs used throughout the vacuum industry.
See it live
A live view straight from a real, running APS System Control instance.
Ready to modernize your vacuum system control?
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