Solutions
Cluster & Multi-Chamber Builders
A loadlock, a robot and many chambers — orchestrated by one recipe
Orchestrating a loadlock, a central transfer robot and many process chambers across several PLCs is normally bespoke SCADA. → Scale by configuration, drive the whole cluster from one recipe, and give every chamber its own state machine and safety.
APS System Control running a six-chamber cluster across five PLCs — loadlock, central transfer robot and four process chambers, each with its own state machine and per-chamber RF power.
6 / 5
Chambers / PLCs (Demo)
1
Recipe Orchestrates All
∞
No Code Cap
Per-Ch
State Machines
What you get
- ▶ Scale by configuration — add a chamber or a PLC as configuration, not re-coded SCADA; no code cap on chambers or PLCs.
- ▶ One recipe drives the cluster — a single transfer SRC DST step moves substrates between chambers across PLCs.
- ▶ Per-chamber autonomy — each chamber has its own state machine, interlocks and alarms (the six-chamber demo runs ~62 interlocks and ~26 alarms).
- ▶ Whole-cluster offline — emulate every PLC at once (the cluster demo defines six S7 servers) to bring up the system before the hardware lands.
- ▶ Live cluster view — per-chamber pressure, power, temperature and gas at a glance, with the transfer module at the centre.
What it means for you
Build and run a multi-chamber cluster tool without writing a custom control system — and grow it without re-engineering.
- Add a chamber or PLC by configuration, not re-coded SCADA.
- One recipe coordinates transfer, safety and process across the whole tool.
- Validate the entire cluster offline before commissioning.